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For the advanced IC technology nodes, the surface quality of the polished silicon substrate surface becomes more and more critical. Haze is used to characterize extremely small pits scatter light disproportionately at the angle of measurement (90°), and Haze collected on full wafer scale with high throughput is the key CMP output parameter in an advanced CMP process. In this study, the influence of...
An easy metal-ion-steered solvothermal method was developed for the one-step synthesis of monodisperse, uniform NixFe3-xO4 polycrystalline nanospheres with tunable sphere diameter (40–400nm) and composition (0≤x≤0.245) via changing just Ni2+/Fe3+ molar ratio (γ). With g increased from 0:1 to 2:1, sphere diameter gradually decreased and crystal size exhibited an inversed U-shaped change tendency, followed...
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