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A Taguchi method with orthogonal array (L 18 ) and signal-to-noise (S/N) ratio was applied to studying performance of pH sensor. The pH sensor was based on a separative extended-gate field effect transistor (SEGFET), and the sensing film was fabricated by a ruthenium-doped titanium dioxide (TiO 2 :Ru). In terms of sensitivity, Taguchi method was evaluated to determine the optimal combination...
The ruthenium-doped titanium dioxide (TiO2: Ru) sensing films were deposited on silicon substrates by sputtering and applied in pH sensors based on separative extended-gate field effect transistor (SEGFET). The Taguchi method with L18 (21×37) orthogonal arrays and signal-to-noise (S/N) ratio were employed to study the performance characteristics. It was evaluated in terms of sensitivity to determine...
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