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This paper presents a complete study from design to fabrication and characterization of a RF-MEMS switch implemented in Si-BCB technology. The topology of the switch is a cantilever which will be integrated into tunable filters for applications from W-frequency band to V-frequency band. Along the whole process, attention has been paid to correlate simulations (electromagnetic and mechanical) and technology...
The choice of membrane technology for filters in W-band was made considering the low dielectric losses observed in previous studies. Within this frequency range, the constraints related to losses and technological feasibility limit heavily the range of achievable impedances. Thus, this limits achievable bandwidth for broadband filters. Moreover for narrowband coupled-lines filters, we were faced with...
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