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Evaluation of the current density distribution of the electron beam emitted from the volcano-structured, double gated Spindt-type field emitter arrays were performed by numerical simulation in conjunction with analytical approach. By assuming the emitter shape as a part of a hyperboloid, the electric field near the emitter surface could be well estimated even by finite difference method. It was found...
The quintuple-gated FEA was measured its specific electron beam spot diameter by improved Knife-Edged method. This result suggested that the spot diameter was less than 40μm at 1mm distance. Developing this result, we proposed a concept of micro-column electron beam microscopes using multi-gated FEA. In a simplest configuration for fabrication the device, means structure was not optimized for microscopes,...
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