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The PVD-TiN metal-gate SOI-CMOS integrated circuits including inverters and ring oscillators have successfully been fabricated on a half-inch (100)-oriented SOI wafer using the minimal-fab and mega-fab hybrid process, and their electrical characteristics have systematically been investigated. It was experimentally found that almost an ideal subthreshold slope (SS) of 67 mV/decade and an extremely...
We successfully demonstrated the electron optics properties of newly designed micro-column in this report. The micro-column consisted of an electron gun and objective lens. The electron gun was structured with FEA and condenser lens. The each structure was optimized in order to perform each abilities and not to disturb other's function. It was confirmed that the diameter of focused beam was around...
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