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We are developing volcano-structured double-gate Spindt-type field emitter array (VDGS-FEA) that is applicable for image sensors. The FEA have good focusing characteristics without current degradation under the beam focusing condition. In this paper, we will present detailed fabrication and typical emission characteristics of VDGS-FEA.
Many kinds of attractive new applications, such as image sensors, stationary X-ray sources, and the column-less SEM, are investigated as post field emission displays that use a gated nano electron source. The fabrication of the gated nano electron source is overviewed from the conventional method to the latest one, especially in regarding to the gate formation process. Multi-stacked gate electrode...
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