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To realize very high performance computing system, we have proposed a novel opto-electronic 3-D LSI in which both electrical and optical devices are integrated. For seamless optical interconnects both vertically and horizontally, through Si photonic via (TSPV) and unidirectional optical coupler (UDOC) are indispensable. We succeeded in fabrication of conventional TSVs and the TSPVs comprising Si core...
To realize very high performance computing system, we have proposed a novel opto-electronic 3-D LSI in which both electrical and optical devices are integrated. For realizing such opto-electronic 3-D LSI, through Si photonic via (TSPV) is indispensable for vertical light transmission. In this work, we fabricated the TSPV comprising Si core and epoxy cladding. We measured near field patterns (NFP)...
We have newly developed a multi-mode polymer optical waveguide with polynorbornene (PNB). The PNB waveguide has extremely low optical loss of 0.03 dB/cm at wavelength of 830-nm and high glass transition temperature (Tg) of 270degC. The PNB waveguide can be formed by only UV irradiation step without both etching and developing processes. By using this method, the waveguide can be easily patterned with...
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