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This article describes the epitaxial growth of superlattice YbGaO3(ZnO)5 (YGZO) and InGaO3(ZnO)5 (IGZO) thin films, which feature nanoscale multilayered structures, on (111) plane yttria-stabilized zirconia (YSZ) substrates through a combination of sputtering and reactive solid phase epitaxy processes. Our fabrication process involved thin ZnO epilayers deposited through sputtering onto the YSZ substrates,...
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