The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A passive thermal micro-actuator with large area specific work and large displacement, fabricated of electroplated nickel on a silicon substrate is presented. The actuation relies on the thermal expansion of beams in a V-shaped geometry. Two V-shaped beam stacks are aligned opposite to each other and are coupled to a lever transmission. The actuator exhibits low energy losses due to the deformation...
Light flux modulators based on micro-opto-electro-mechanical systems (MOEMS) enable high resolution displacement based inertial sensors. The three major noise sources for such devices are the Brownian noise originating from the surrounding air, the noise emerging from the optoelectronic detector and the noise contributed by the amplifier circuit. To unveil the resolution limiting mechanisms, we investigated...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.