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The evolution of silicon optical modulators is recalled, from the first effect demonstrations to the characterization of high-performance devices integrated in optical waveguides. Among possibilities to achieve optical modulation in silicon-based materials, the carrier depletion effect has demonstrated good capacities. Carrier depletion in Si and SiGe/Si structures has been theoretically and experimentally...
Impressive progress have been performed on high speed silicon optical modulators for a few years. An overview of recent works will be reported and new results on a lateral pin diode will be presented.
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