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In this article, we present a complementary metal-oxide semiconductor microelectromechanical system (CMOS MEMS) thermoelectronic flow sensor and discuss the advantages of employing anemometric and calorimetric transduction principles simultaneously. This readout concept exploits the fact that anemometric flow sensors take advantage of the maximum temperature generated within the device and, thus,...
In this paper we present the first CMOS MEMS thermoelectronic multidirectional flow sensor. We also introduce a Constant Temperature circuit based on diode thermal feedback and calibrate the sensor for 2D multidirectional wall shear stress measurements up to 2 Pa. The sensor electro-thermal transduction efficiency is 115 pW/°C. Average sensitivity is 250 mV/Pa at 225 °C operating temperature (Vd=0...
In this paper we outline our work towards high sensitivity graphene-based detectors at X-Ray, Terahertz and visible frequencies. We present our current experimental results showing our energy sensitivity and outline potential improvements to our designs to increase this sensitivity.
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