The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
This work presents a passive resonant micro-electromechanical phase detector (PD). The PD structure is comprised of two thin film piezoelectric on silicon (TPoS) resonator plates coupled by a silicon beam in the middle. The device exhibits a width extensional resonance mode in which resonant plates vibrate out of phase. When actuated in this mode, the interference of acoustic waves generated from...
This work presents low motional resistance piezoelectric MEMS resonators with the highest quality factor (Q) in water reported to date that can be used for direct biomarker or chemical detection in liquid media. Thin film Piezoelectric-on-substrate (TPoS) resonators operating in higher order lateral bulk acoustic modes are designed and fabricated, and their performance as mass balances in water is...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.