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This paper reports on high frequency micromechanical resonant silicon microbalances capable of detection and concentration measurement of volatile organic compounds in gas phase. In this work, regular gasoline has been used as the source of organic compounds in gas phase and 1813 photoresist has been used as the absorbent coating on the resonator surfaces. A new technique for formation of thicker...
This work demonstrates detection of organic vapors in the air using micromechanical resonators Fully silicon thermally actuated resonators with piezoresistive readout have been utilized to detect presence of gasoline vapor in air. The resonators have been fabricated using a single mask process on SOI substrates and have resonant frequencies in the sub-MHz to a few MHz range. Using a thin arbitrary...
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