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This paper reports implementation and characterization of MEMS pressure sensors comprised of a thin silicon membrane coupled to a thermal-piezoresistive resonator. Membrane deflections due to pressure difference across the membrane slightly deform the piezoresistive beam on the resonator, changing its stiffness and consequently its resonance frequency. The pressure sensor can be used in different...
This paper presents MEMS resonant stress sensors for real-time monitoring of induced shear stress during formation of a thin film on a micro-diaphragm. The device is comprised of a thin silicon membrane coupled to a thermal-piezoresistive resonator. Membrane deflection due to the stress resulting from deposition or growth of a thin film deforms the resonator, thus changing its resonance frequency...
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