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Aluminum-doped zinc oxide (AZO) thin films were deposited on glass substrates by ultrasonic spray pyrolysis, from metal salt precursors. The electrical and optical properties were investigated as a function of the deposition parameters and the optimum conditions were defined. The thin films exhibit ∼80% transparency and a resistivity in the order of 2×10−2Ωcm. The electrical properties can be improved...
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