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Artificial nanotransport inspired by intracellular transport processes has been investigated for over a decade using the motor protein kinesin and microtubules to achieve unidirectional cargo transport. Here, we demonstrate simultaneous bidirectional nanotransport of microspheres by integrating the oppositely directed motor proteins, kinesin and dynein, with an oriented microtubule track. Our statistical...
In this paper, we discuss a flip-chip packaging method using liquid solder for 3D large-scale electronic/MEMS co-integration. This approach has been inspired from self-assembly technique which is emerging as one of the main methods for fabrication of heterogeneous micro-and nano-systems. We proposed to form solder bump by coating liquid solder directly on electrodes of a MEMS chip based on sophisticate...
This paper gives a brief overview of MEMS research and commercialization in the past two decades, its present status, and future prospects. The historical development of MEMS technology is followed in relation to devices enabled by developed technology For the present status, the importance of MEMS design and fabrication infrastructures is discussed in order to help more MEMS products to be successful...
This paper presents the rotation of a silicon nanoneedle fueled by Brownian motion which may lead to a new class of thermo-mechanical nano-motors. A nanoneedle with a magnetic bead at one end is immobilized at the end by a permanent magnet in the water and its rotational Brownian motion is observed. DRIE of a silicon substrate with magnetic nanobeads as the etching mask results in 3.5 mum long needles...
This paper deals with the first simultaneous electrical and mechanical characterization of DNA bundles by a MEMS tool. The silicon-based device has an integrated actuator and a differential capacitive position sensor. Our experiments show that under constant humidity conditions, a rope of DNA has a nearly Ohmic conductivity and behaves as a viscoelastic material.
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