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Bidirectional rotary motion of a millimeter-scale traveling wave ultrasonic motor is demonstrated using solution-deposited thin-film lead zirconate titanate and wafer-scale microelectromechanical system fabrication techniques. Rotation speeds of a motor 3 mm in diameter have been characterized up to 2000 r/min as a function of voltage, phase, and frequency, with power consumption less than 4 mW. Frequency...
Piezoelectric micromachined ultrasonic transducers (PMUTs) have the potential for broad bandwidth, thus enabling high resolution imaging. However, previous PMUTs had fractional bandwidths of only ∼50% or smaller because of the thick multilayer PMUT structure. Here, we demonstrate broadband PZT PMUTs that achieve a 97% fractional bandwidth by utilizing a thinner structure excited at two adjacent mechanical...
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