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A novel maskless nanoscale material etching method based on microcavities dielectric barrier discharge (DBD) array with advantages of high accuracy and high efficiency has been proposed in this paper. A two-dimensional simulation of pyramidal hollow cathode DBD microplasma operated in Ar has been studied using FEM method. Results indicated that high density microplasma with its magnitude of 1e18/m3...
This paper reports a new maskless nanoscale patterning method based on microdischarge devices tips array. That is, inverted pyramid microplasma devices are integrated into the scanning probe hollow tips array with nano-apertures. A 2×2 inverted pyramidal thin-wall hollow tips array with each microcavity dimension of 50µm microdischarge devices are sucessfully fabricated by MEMS process. Nano-apertures...
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