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In this paper, a coarse/fine dual positioning stage for single degree of freedom using pneumatic actuators is developed. The coarse movement utilizes a pneumatic cylinder with air bearings. The fine movement utilizes an actuator driven by pneumatic bellows. A high-performance pneumatic servo valve, we have developed, having high dynamics up to 300Hz is used to control the coarse stage. The fine stage...
In this paper, a coarse/fine dual positioning stage for single degree of freedom using pneumatic actuators is developed. The coarse movement utilizes a pneumatic cylinder with air bearings. The fine movement utilizes an actuator driven by pneumatic bellows. A high performance pneumatic servo valve, we have developed, having high dynamics up to 300 Hz is used to control the coarse stage. The fine stage...
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