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Ag doped BaTiO3-CuO mixed oxide thin films are evaluated for their carbon-dioxide sensing characteristics. The metal oxide films of different thicknesses are deposited on oxidized p type Si <100> substrate by RF Sputtering. Sensing characteristics for different CO2 concentration, (300 ppm – 1000 ppm) are obtained for different operating temperatures, (100° C – 400° C). Optimum temperature for...
BaTiO3 based thin films are evaluated for their Carbon dioxide sensing characteristics are been presented in this paper. The metal oxide films of 18nm, 37nm and 55 nm thicknesses are deposited on oxidized p-Si (100) substrate by RF-Sputtering. The effect of annealing on sensing properties is evaluated. The 55 nm thick unannealed films show the highest sensitivity of 10% for 500ppm of CO2, at an operating...
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