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This paper investigated the effects of rapid thermal annealing (RTA) on nucleation and growth behavior of sol-gel derived lead zirconate titanate (PZT) films. The effects of RTA on films' surface morphology, residual stress and orientation were also studied. It was found that residual stress of the film can be effectively reduced by extending the RTA time. High heating-rate was preferred for uniform...
The nucleation and growth behavior of sol-gel-derived lead zirconate titanate (PZT) films was investigated at different rapid thermal annealing (RTA) processes. The effects of RTA on PZT film surface morphology, crystal orientation, residual stress, and properties were also studied and are discussed. PZT nucleation and growth behavior were found to be more sensitive to heating rate than to hold time...
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