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This paper studies the Diamond/ZnO/LiNbO3 structure, numerically and experimentally, as a candidate for a packageless sensor based on the surface acoustic wave technology. The structure is compared with an AlN/ZnO/LiNbO3 structure, in order to highlight better performances of diamond with respect to AlN. Early experimental results of nanocrystalline diamond growth on ZnO/Si are presented.
Surface acoustic wave (SAW) devices are widely used as filters or resonators for mobile communications or radars applications. However, the velocity of the wave can be very sensitive to physical parameters of the environment (temperature, strain…), which allows the device to be used as a sensor. SAW devices are passive (batteryless) and wireless, but are often bulky due to the package. To dramatically...
This paper describes the potential of the AlN/ZnO/LiNbO3 structure for packageless surface acoustic wave sensors. This structure, based on the waveguiding acoustic wave principle, is studied numerically and experimentally.
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