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The paper reports on the developments of Ge/SiGe quantum well (QW) waveguide modulators operating at 1.3 μm. Two modulator configurations have been studied: The first one is based on QW structures grown on a 13-μm SiGe buffer on bulk silicon. Light was directly coupled and propagated in Ge/ Si Ge QWs. Using a 3-μm-wide and 50-μm-long modulator, an extinction ratio (ER) up to 6 dB was...
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