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In this paper, the effect of incorporating a structure on the top of the membrane layer on the sensitivity and nonlinearity of pressure sensor are analysed using finite finite element analysis (FEA) software, CoventorWare which involved coupled analysis between MemMech and MemPZR. By considering the stress concentration region on the membrane structure, a newly developed design structure of proliferated...
In this paper, the authors demonstrate a method to produce nanostructures and nanowires with dimensions down to 10nm by a self-alignment process using the standard CMOS spacer technology. In this process, very accurate alignment is achieved because the alignment is not determined by the lithographic tool but by the structures and materials themselves. The spacer technique is commonly used in the fabrication...
This paper presents the development of a novel micropump actuated electrostatically utilizing CMOS-compatible silicon micromachining fabrication process. The fabrication process consists of six photolithography steps and five chemical vapor depositions. Etching of the sacrificial oxide layer for the diaphragm chamber, microchannels and inlet/outlet reservoirs are achieved using etch-release holes...
In this study, a novel approach in designing an electrostatically actuated diaphragm valveless micropump (EDVM) based on CMOS-compatible surface micromachining (SMM) fabrication process has been presented. One major advantage of the designed EDVM using SMM process as compared to conventional EDVM fabricated using bulk micromachining process is that the actuation voltage is now applied across the working...
In this study, a novel Artificial Neural Network (ANN) based on the feed-forward back-propagation (FFBP) algorithm has been used to predict the deflections of a rectangular diaphragm actuated electrostatically under different loadings and geometrical parameters. A limited range of simulation results obtained via CoventorWarereg will initially be used to train the neural network via back-propagation...
This work studies the bending characteristics due to the effects of self-weight and non-rigidity induced on the surface micromachined (SMM) micro-electro-mechanical systems (MEMS) test structures. By using the available information of the linear bending stiffness for MEMS, the bending characteristics of the SMM MEMS cantilever test structure can be evaluated analytically. Results obtained from the...
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