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The ever increasing stress engineering raises a major concern of strong layout-dependent effects (LDE) in the advanced technology nodes. We report on the dependency of SiGe S/D and STI induced stress on fin length, position of the gate along the fin and fin to fin distances. The efficiency of epitaxial S/D SiGe stressors is reduced when the fin length is decreased and strongly degraded for fins with...
This work proposes an array-based evaluation circuit for efficient and massively parallel characterization of Bias Temperature Instability (BTI). This design is highly efficient when studying the BTI time-dependent variability in deeply-scaled devices, where hundreds of devices should be tested in order to obtain a statistically significant sample size. The circuit controls stress and measurement...
Substrate noise generated by the switching digital circuits degrades the performance of analog circuits embedded on the same substrate. It is therefore important to know the amount of noise at a certain point on the substrate. Existing transistor-level simulation approaches based on a substrate model extracted from layout information are not feasible for digital circuits of practical size. This paper...
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