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This paper presents unreleased CMOS-integrated MEMS resonators fabricated at the transistor level of IBM's 32SOI technology and realized without the need for any post-processing or packaging. In this technology, resonant body transistors (RBTs) are driven capacitively and sensed piezoresistively using an n-channel field effect transistor (FET). Acoustic Bragg Reflectors (ABRs) are used to localize...
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