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Current research on transparent conductive oxides (TCOs) is focusing on indium-free TCOs, such as Al-doped ZnO (AZO), as an alternative to indium–tin oxide. In this work, AZO thin films were grown by Pulsed Laser Deposition at room temperature in oxygen atmosphere. The O 2 pressure was varied from 0.01Pa to 10Pa, highlighting the effects of defect formation and oxygen vacancies on the film...
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