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This paper introduces a novel dual-axis accelerometer structure with low cross-sensitivity. The device is fabricated in an SOI process, namely SOIMUMPs, and its fabrication is finalized by an in-house release step. The device measures 1 × 1 mm2 with four proof masses that are able to sense accelerations in the X and Y axes independently. Two commercial capacitance-to-digital converters are used to...
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