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The exponentially weighted moving average (EWMA) controller is a popular run-to-run control scheme in semiconductor manufacturing because of its effectiveness and simplicity. In this paper, we propose an improved variable EWMA controller design method. The optimal discount factor of the EWMA controller is determined by minimizing the mean square error of process output at each run. The proposed method...
The exponentially weighted moving average (EWMA) controller is a popular run-to-run (RtR) control scheme in semiconductor manufacturing because of its effectiveness and simplicity. In this paper we propose an improved variable EWMA controller design method. The optimal discount factor of the EWMA controller is determined by minimizing the mean square error (MSE) of process output at each run. The...
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