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In this article, a one‐tier on‐wafer device de‐embedding methodology up to millimeter wave regions is presented by using the line‐series‐shunt calibration technique. All the calibration and de‐embedding processes are accomplished without the needs of impedance‐standard‐substrate (ISS), which defines the reference impedance in the conventional on‐wafer measurements. Three on‐chip standards, namely...
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