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This paper reports the shielding effect of soft magnetic film as a thin film noise suppressor applied to a test chip implemented in 65 nm seven metal CMOS technology. This test chip is equipped with a noise generator circuit. The 0.2–1- m-thick magnetic films, which are integrated with polyimide substrates, are mounted onto the noise generator circuit in the test chip, and 2-m-thick magnetic...
Performance of soft magnetic CoZrNb film as a thin film noise suppressor and its application to an noise emulator chip fabricated by 90/65nm CMOS technology are discussed. Intra-chip decoupling was studied by the electromagnetic coupling between two miniature coils made on a noise test chip implemented in CMOS 90nm technology. Inter-chip decoupling (radiation) was evaluated by the coupling between...
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