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A novel three-axial tactile sensor based on the differential capacitive principle is presented. The sensor is fabricated using IC processing and bulk-micromachining technology. Normal and shear forces are detected by capacitor arrays under force mesas. Experimental devices show sensitivities of 0.13 pF g -1 to normal forces, and 0.32 pF g -1 to shear forces in a force range...
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