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The optical properties of Si nanocrystals (nc-Si) with different sizes (2∼5 nm) embedded in a SiO2 matrix synthesized by the SiOx/SiO2 superlattice approach were studied in a temperature range from room temperature to 600 K by spectroscopic ellipsometry. The Maxwell–Garnett effective medium approximation and Lorentz oscillator model were employed to extract the dielectric...
An effective method for determining the optical constants of Ta2O5 thin films deposited on crystal silicon (c-Si) using spectroscopic ellipsometry (SE) measurement with a two-film model (ambient–oxide–interlayer–substrate) was presented. Ta2O5 thin films with thickness range of 1–400 nm have been prepared by the electron beam evaporation (EBE) method. We find that the refractive indices of Ta2O5 ultrathin...
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