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During producing silicon surface and fabricating silicon devices, the machining, cutting and milling from nanoscale to macroscale are accomplished with friction and wear under single- and multiple-asperity contact. In the present study, the scratch tests on silicon surface under single- and multiple-asperity contact were contrastively investigated, and the transition and correlation between different...
During producing silicon surface and fabricating silicon devices, the machining, cutting and milling from nanoscale to macroscale are accomplished with friction and wear under single- and multiple-asperity contact. In the present study, the scratch tests on silicon surface under single- and multiple-asperity contact were contrastively investigated, and the transition and correlation between different...
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