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We developed a model for the motional impedance Zm of electrostatic resonators that operate in a nonlinear regime. The model predicts that the Zm at resonance has the same expression as it has in the linear case. In addition, we developed a new measurement setup, which is based on a variable-phase feedback circuit. This setup enables the measurement of Zm at operating points that are unobservable...
In microelectromechanical systems resonators, nonlinear operation is feasible, but instabilities can arise if open-loop resonators operate above the critical vibration amplitude. This fact has led to a reluctance to operate resonator-based oscillators above this amplitude. This study experimentally demonstrates stable operation of these oscillators far beyond the critical vibration amplitude....
We present a hermetically encapsulated breathe-mode ring resonator with very high quality factor (~473,000) and frequency at 10.65 MHz and 13.29 MHz. The resonator's nonlinear behavior is experimentally characterized and theoretically analyzed for the first time. The maximum current handling is measured and verified using two different methods. We find that material nonlinearity (nonlinear Young's...
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