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The selective etching of Si over SiO2 in a CF4/O2 plasma has been studied using simulation and optimization. A showerhead plasma reactor was modeled as a well-mixed reactor, which was follwed by development of an otimal recipe. The optimizer, based on the generalized reduced gradient method, calculated optimal etch recipes using a set of mean values for the uncertain parameters. The-optimal end-point...
This paper describes the effect of a number of commonly applied simplifications on the optimal performance of a batch still equipped with trays. A general rigorous model was formulated and verified by comparison with previous work. The model was then simplified using several commonly made assumptions. An optimal control policy was determined for each of the simplified models, and this controller was...
Most studies on the control of fixed-bed reactors have focused on dealing with small perturbations about the steady-state inlet conditions. However, little attention has been given to the problem of controlling a reactor subject to large inlet disturbances. Adaptive control offers one possible solution to this problem. This paper discusses application of the Generalized Predictive Controller to a...
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