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MEMS Disc resonators have emerged as a leading choice for RF communication systems upto UHF range. Inorder to evaluate the performance of a MEMS resonator it is important to understand the physical loss mechanisms, which limit the quality factor. In this paper, an important energy loss mechanism — ThermoElastic Damping (TED) effect in disc resonators is analyzed by evaluating the TED limited Quality...
MEMS based Bulk Acoustic Wave (BAW) resonators are rapidly growing highly integrated devices which can offer high Quality Factor (Q) values at operating frequencies up to the VHF and UHF ranges i.e. high f-Q product. In a BAW resonator, a piezoelectric layer which is the main part of the resonator generates the vertical acoustic standing waves within the layer. The resonant frequency of the BAW resonators...
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