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This paper describes the design and characterization of a MEMS resonator oscillator fabricated in a 0.35-μm CMOS MEMS multi-project wafer (MPW) process. The polysilicon in CMOS is partially embedded in the microstructure to reduce the curl within less than 100 nm. The measured resonance frequency of the resonator is 116.1 kHz with a quality factor of 332 at 1 atm. The quality factor is raised to 930...
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