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In this paper, we investigated the method of automatic matching of the resonant frequencies for the decoupled dual-mass $z$ -axis silicon micro-gyroscopes. The structure of the studied gyroscope is first presented, which features the tuning combs for adjusting the resonant frequency, suppressing the quadrature error, and applying the feedback force. According to the phase characteristic of oscillators,...
This paper deal with a new symmetrical and Decoupled Silicon Micro-Gyroscope (DSMG). By the simplified motion model of the DSMG, the mechanical coupling error from the width errors of suspension beams is analyzed and deduced. The simulation shows that the simulated results of mechanical coupling error basically equal to the calculation results. The characterization test results of the DSMG show that...
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