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This paper considers the electromechanical response of electrostatic actuators that are driven by both voltage and charge. The model system is an electrostatic actuator in which the suspended electrode is subjected to a driving voltage and the fixed electrode, which is electrostatically floating, is loaded by charge. The response of the system is analyzed using energy methods, and it is shown that...
It is demonstrated theoretically and experimentally, that charge on floating electrodes can be measured by its effect on the electromechanical response of an electrostatic actuator. Charged, electrostatically-floating electrodes can be used as a DC bias source or for memory storage. Charge on a floating electrode must be measured indirectly because any direct measurement (e.g. measuring the voltage...
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