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We present a chemical sensor based on a capacitive micromachined ultrasonic transducer (CMUT) configured as a resonant mass sensor with a chemically selective polymer coating. The sensing unit of the CMUT consists of 100s to 1000s of resonators connected in parallel and acts as a single resonator. The high resonant frequency (18.2MHz) and the small mass (296pg) enable the CMUT to have a good mass...
We report on a capacitive resonant sensor with an oxide-nitride (ON) layer used as charge trap. The main idea is that we intentionally inject charges into the ON layer by biasing the device for 30 s with 160% of the pull-in voltage. We use a capacitive micromachined ultrasonic transducer (CMUT) to demonstrate this idea. The CMUT is fabricated via high temperature assisted direct wafer bonding after...
We present the successful fabrication of capacitive micromachined ultrasonic transducers (CMUTs) based on low temperature wafer bonding (< 400°C). Such a fabrication process enables the direct integration of CMUTs on top of IC substrates, and requires only two additional lithography steps for fabricating the complete CMUT. Our approach benefits from both the integrated electronics and the well-controlled...
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