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This paper reports on the experimental study of the effects of volume scaling in aluminum nitride (AlN) nano plate resonators on quality factor. For the first time, we show that efficient piezoelectric transduction of a high frequency (∼ 1 GHz) lateral-extensional mode of vibration and a high quality factor approaching 900 can be achieved when the thickness of the AlN nano plate is scaled from 200...
This paper reports on an innovative chemical sensing mechanism based on the effective transduction of the analyte induced variations in the electrical conductivity of a graphene electrode employed to excite mechanical vibration in an Aluminum Nitride (AlN) piezoelectric nano plate resonator (NPR). We show that the use of a single atomic layer graphene as a virtually massless and strainless electrode...
This paper reports on the first demonstration of a 457 MHz AlN Piezolectric Resonant Nanochannel (PRN) for bio-sensing applications in liquid environment. A novel process consisting of 7 lithographic steps was developed to fabricate the PRN. The new resonant device shows an unchanged value of the electromechanical coupling, kt2 (about 0.8 %), whether the channel is filled with air or water and a quality...
This paper reports on the first demonstration of a single multiplexed CMOS oscillator circuit employed as direct frequency readout for an array of 8 nanoscaled aluminum nitride Contour-Mode Resonant Sensors (CMR-S). In this first prototype 8 thin-film (250 nm) AlN CMR-S operating at 186 MHz were fabricated on the same chip and simultaneously wire bonded to a Pierce-like oscillator circuit (fabricated...
This paper reports on the design and experimental verification of a new class of ultra-thin-film (250 nm) aluminum nitride (AlN) microelectromechanical system (MEMS) contour-mode resonators (CMRs) suitable for the fabrication of ultra sensitive gravimetric sensors. The device thickness was opportunely scaled in order to increase the mass sensitivity, while keeping a constant frequency of operation...
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