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We present the miniaturized RF tunable band-pass filter based on magnetoelectric NEMS coupled ring-shaped FBAR resonator with contour mode of transmission. The acoustic wave can be strongly coupled with the radiation electromagnetic wave due to the strong magnetoelectric effect between the piezomagnetic FeGaB and piezoelectric AlN thin film. For the FBAR resonator, a return loss of −11.15 dB and insertion...
This paper reports on the experimental study of the effects of volume scaling in aluminum nitride (AlN) nano plate resonators on quality factor. For the first time, we show that efficient piezoelectric transduction of a high frequency (∼ 1 GHz) lateral-extensional mode of vibration and a high quality factor approaching 900 can be achieved when the thickness of the AlN nano plate is scaled from 200...
This paper reports on an innovative chemical sensing mechanism based on the effective transduction of the analyte induced variations in the electrical conductivity of a graphene electrode employed to excite mechanical vibration in an Aluminum Nitride (AlN) piezoelectric nano plate resonator (NPR). We show that the use of a single atomic layer graphene as a virtually massless and strainless electrode...
This paper reports on the first demonstration of a high resolution (noise equivalent power NEP of 1.9 nW/Hz1/2 at 200 Hz bandwidth) and fast (thermal time constant of 5.3 ms) infrared (IR) detector based on a nanoelectromechanical system (NEMS) resonant piezoelectric fishnet-like metasurface (PFM). For the first time, an ultrathin (650 nm) piezoelectric fishnet-like metasurface is employed to form...
This paper reports on the first demonstration of a high frequency (245 MHz) single transistor oscillator based on Graphene-Aluminum Nitride (G-AlN) nano-plate resonator (NPR). For the first time, a 2-dimensional (2D) electrically conductive graphene layer was integrated on top of an ultra-thin (500 nm) AlN nano-plate and excited into a high frequency contour-extensional mode of vibration by piezoelectric...
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