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We present the miniaturized RF tunable band-pass filter based on magnetoelectric NEMS coupled ring-shaped FBAR resonator with contour mode of transmission. The acoustic wave can be strongly coupled with the radiation electromagnetic wave due to the strong magnetoelectric effect between the piezomagnetic FeGaB and piezoelectric AlN thin film. For the FBAR resonator, a return loss of −11.15 dB and insertion...
This paper demonstrates a miniaturized and high resolution (16 nT/Hz$^{1/2}$ ) magnetometer based on a high frequency (168.1 MHz) magnetoelectric Microelectromechanical Systems-Complementary metal-oxide- semiconductor (MEMS-CMOS) oscillator. For the first time, a high frequency and high electromechanical performance (quality factor, $Q~\sim ~1084$ and electromechanical coupling coefficient, $k_{t}^{2}~\sim ~1.18$ ...
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