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In this paper, a novel decoupled microgyroscopes was designed and simulated. The device named as MS-Gyro is partially decoupled structure. The trench isolation technology is introduced in new design. The new design consists of drive frame, sense frame, movable sense electrode, springs and isolation connection. The movable sense electrodes connect with the drive frame directly and are isolated from...
In this paper, microgyroscopes using fully decoupled structure (FDS) and partially decoupled structure (PDS) were designed. They both consist of dual proof mass, sense frame and drive frame structure. Sense frame is directly anchored on the substrate in FDS. The cross talk between drive mode and sense mode was investigated. The ANSYS software has been used to simulate two types of decoupled Z-axis...
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