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This paper presents the Butterworth-van Dyke model and quantitative comparison that explore the design space of lead zirconate titanate-only (PZT) and PZT on 3-, 5-, and 10-μm single-crystal silicon (SCS) high-overtone widthextensional mode (WEM) resonators with identical lateral dimensions for incorporation into radio frequency microelectromechanical systems (RF MEMS) filters and oscillators. A novel...
This paper reports on the co-fabrication of RF MEMS radial contour mode resonators and photonic whispering gallery mode disk resonators on the same SOI substrate. By mechanically coupling the MEMS and photonic resonators, we have demonstrated a silicon acousto-optic modulator (AOM) which can modulate a 1550 nm laser at 288 MHz. An output RF power of -83.7 dBm is observed corresponding to a modulation...
We present in this paper the design and fabrication of a homogeneous silicon micromechanical resonator actuated using forces acting on the immobile charge in the depletion region of a symmetrically doped pn-diode. The proposed resonator combines the high quality factor (Q) of air-gap transduced resonators with the frequency scaling benefits of internal dielectrically transduced resonators. Using this...
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