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Electrostatically actuated microelectromechanical system (MEMS) oscillators are limited to few megahertz–gigahertz range on account of transduction inefficiency at higher frequencies. Piezoelectric transduction affords lower motional impedances at high frequencies, however mass-loading on account of metal electrodes imposes practical limits on the mechanical quality factor of piezoelectric resonators...
We present a silicon opto-acoustic oscillator operating at 2.05GHz with signal power +18dBm and phase noise −80dBc/Hz at 10kHz offset from carrier. We employ displacement amplification and partial air gap capacitive transduction to enhance the transduction efficiency. Built-in nonlinear opto-mechanical modulation provides noiseless upconversion of the oscillation signal all the way up to 16.4GHz with...
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