The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
We present a silicon opto-acoustic oscillator operating at 2.05GHz with signal power +18dBm and phase noise −80dBc/Hz at 10kHz offset from carrier. We employ displacement amplification and partial air gap capacitive transduction to enhance the transduction efficiency. Built-in nonlinear opto-mechanical modulation provides noiseless upconversion of the oscillation signal all the way up to 16.4GHz with...
This paper presents a fabrication process to manufacture air-gap capacitively-transduced RF MEMS resonators. 2-port measurements show motional impedance (Rx) < 1.3 k?? and quality factor (Q) > 65,000 at 223 MHz in vacuum. The fabrication process involves depositing a dual-layer spacer of 10 nm of SiO2 and 90 nm of hafnia via atomic layer deposition (ALD) followed by oxide release. Nanometer...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.