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Epitaxial growth of high‐quality Mgx Zn1‐xO films on Zn faces of single crystal ZnO substrates was achieved by a plasma‐assisted reactive evaporation method using ZnMg alloys. The composition of Mg of Mgx Zn1‐xO films grown by using this method strongly depended on the composition of Mg of ZnMg alloys. Mg composition of Mgx Zn1‐xO films increased with increase in the composition of Mg of ZnMg alloys...
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