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AFM images are distorted representations of sample surfaces due to the dilation produced by the AFM tip shape in micro/nano-scale profile measurement. It is necessary to obtain the tip shape information in order to correct such distortion in micro/nano metrology. Ordered nano porous alumina templates have attracted increasing attention in recent years due to their possible utilization as templates...
A geometric model-based approach is presented to estimate tip shape and status by scanned AFM images and scanned SEM images of AFM tip in linewidth and profile measurement. The interaction between AFM tip and the sample is revealed as tip moves on the sample. The slope angle between the symmetry axis of the tip and the perpendicular to the surface of the investigated sample is characterized as a key...
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